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CLEAN FLOW SYSTEM
Clean Loader Unloader
Clean Buffer
Clean Robot
Robot to be available for the fifth generation glass substrates
Robot to be available for the sixth and seventh generation glass substrates
Clean Exchanger
EFEM designed for 300mm (MEF series)
Load Port designed for 300mm FOUP (Comply with SEMI)
Handling Robot for wafer 300mm
Scissor Lifts
Conveyor System
Contact
Clean Robot

For LC panels and wafers
MEIKIKOU Clean Robots have attained a class 10 (LC panel) & a class 1 (wafer) cleanliness. Ideal handling is realized. MEIKIKOU Clean Robots are articulated assembly robots with three to four axes. Clean Robots are included in the configurations of EFEM, Clean Loader·Unloader, or Clean Stocker. They provide ideal handling of semiconductor wafers or glass substrates between devices or cassette devices in the production or inspection process in a clean room.

Clean Loader·Onloader
(glass substrates)
  EFEM
(wafer)
Robot to be available for glass substrates Robot to be available for wafers
3000 Series 2000 Series 1500 Series 1200 Series 515・525 Series
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MCR3-4A3000T
Robot to be available for the sixth and seventh generation glass substrates
MCR3-3C2000
Robot to be available for the fifth generation glass substrates
MCR3-3A1500T-DZ
Cylindrical Coordinate Robot
MCR3-3A1200T
Cylindrical Coordinate Robot
MCR2-3A515T
Cylindrical Coordinate Robot

Series Model Type of arm Referential size of transfer work handled(glass substrates) X-axis stroke (mm) Theta-axis stroke (degree) Z-axis stroke (max/mm)
3000Series MCR3-4A3000T Twin arm 1800x2100 3000 330 1800
MCR3-4A3000 Single arm 1800x2100 3000 330 1800
2000Series MCR3-4C2000T Twin arm 1100x1250 2000 330 1800
MCR3-4C2000 Single arm 1100x1250 2000 330 1800
1500Series MCR3-3A1500T-DZ Twin arm 850x950 1500 330 1100
MCR3-3A1500T Twin arm 850x950 1500 330 500
MCR3-3A1500-DZ Single arm 850x950 1500 330 1100
MCR3-3A1500 Single arm 850x950 1500 330 500
1200Series MCR3-3A1200T Twin arm 600x720 1200 330 750
MCR3-3A1200-DZ Single arm 600x720 1200 330 1100
MCR3-3A1200 Single arm 600x720 1200 330 750

Series Model Type of arm Referential size of transfer work handled (glass substrates) X-axis stroke (mm) Theta-axis stroke (degree) Z-axis stroke (max/mm)
515Series MCR3-3A515T-DZ Twin arm 300mm 515 330 1000
MCR3-3A515T Twin arm 300mm 515 330 300
525Series MCR3-3A525-DZ Single arm 300mm 525 330 1000
MCR3-3A525 Single arm 300mm 525 330 300

Features
Cleanliness / LC panel : class 10 (0.1μ) x afer : class 1 (0.1μ)
Magnetic fluid sealant is used for the X-axis articulated unit to realize a particle-free condition. MEIKIKOU Clean Robots are ideal for applications such as the handling of LC panels or semiconductor material during the production processes.

Smooth drive and compact body
AC servomotors are utilized in the axis units for a smooth drive. Also, the compact controller containing the servo driver contributes to space savings.

Featuring an adjustable pendant-type teaching box
Teaching operations for robots are conducted through a pendant type teaching box. It enables to do teaching operation, easily, monitoring the motion of the robot.

Cables are located inside the X-axis arms
Wiring and piping to the handling section run through the arm of which standard supply comprises one air pipe and two electric lines.



Robot Control System
  • The controller is available both for parallel interfaces and for serial ones.
  • A distributing control for each axis brings about less wiring.
  • AC servomotors are utilized in all axes for speed-up in S-shape acceleration or deceleration.
  • Alignment (contact-less alignment), mapping, and other useful functions are also available.

* For further information about robot to be available for the sixth and seventh generation glass substrates, do not hesitate to contact us:
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