MEIKIKOU CORPORATION
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CLEAN FLOW SYSTEM
Clean Loader Unloader
Clean Buffer
Clean Robot
Robot to be available for the fifth generation glass substrates
Robot to be available for the sixth and seventh generation glass substrates
Clean Exchanger
EFEM designed for 300mm (MEF series)
Load Port designed for 300mm FOUP (Comply with SEMI)
Handling Robot for wafer 300mm
Scissor Lifts
Conveyor System
Contact
EFEM designed for 300mm (MEF series)

Clean Flow System, Handling system for wafer
EFEM designed for 300mm (MEF series) This handling system unloads wafers from a carrier and loads them into equipment. Wafers are handled by the robot. Cleanliness; Class1

Features
  • Welcome is asking for number of Load port or combination of individual Robot types.
  • The basic body provides perfect cleanliness and enormous throughput.
  • A high performance FFU appropriately controls a differential pressure in EFEM.

* For further information about Handling system for wafer; EFEM, do not hesitate to contact us:
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