MEIKIKOU CORPORATION
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CLEAN FLOW SYSTEM
Clean Loader Unloader
Clean Buffer
Clean Robot
Robot to be available for the fifth generation glass substrates
Robot to be available for the sixth and seventh generation glass substrates
Clean Exchanger
EFEM designed for 300mm (MEF series)
Load Port designed for 300mm FOUP (Comply with SEMI)
Handling Robot for wafer 300mm
Scissor Lifts
Conveyor System
Contact
Clean Loader · Unloader

Clean Flow System,Handling system for glass substrates
Clean Loader Unloader Buffer
The Clean Loader·Unloader carries parts between the clean cassette and equipment in the production process in the clean room. One Clean Robot carries the glass substrates into or out of 2 to 4 cassettes. Input or output of the cassettes is conducted by Clean AG and RGV. The size of the cassette is automatically identified so that the robot can handle the several types of items at once. Also the clean booth is mounted on the top.

Features
  • Class 10/0.1μm cleanliness is ensured by the usage of the clean robot and clean booth.
  • More glass substrates can be stored because three cassettes are supplied.
  • The action of the Loader·Unloader is controlled by the condition of the cassette, whether it is full or empty. The cassettes are sequentially rotated.
  • Unmanned operation is available because the input and output of the cassettes are conducted by Clean AGV and RGV.
  • As the size of the cassette and the glass substrates is automatically identified, the robot can handle several items without changing the stage.
  • Optical correction function is equipped.
Features of Control
  • Cassette position compensator (Cassette alignment)
  • Substrate position compensator (Substrate alignment)
  • Confirmation sensor of substrate presence (Mapping sensor)
  • CIM correspondence
  • CIM block controller
Referential Diagram
7G size 3Port Loader / Unloader / Buffer
7G size 3Port
Loader / Unloader / Buffer
5G size 3Port Loader / Unloader / Buffer
5G size 3Port
Loader / Unloader / Buffer
* The size in a drawing is a reference value.

Clean Robot provides ideal glass substrate handling.
Robot to be available for the seventh generation glass substrates   Robot to be available for the fifth generation glass substrates
Robot to be available for the seventh generation glass substrates Robot to be available for the fifth generation glass substrates

* For further information about Clean Flow System, do not hesitate to contact us:
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