MEIKIKOU CORPORATION
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CLEAN FLOW SYSTEM
Clean Loader Unloader
Clean Buffer
Clean Robot
Robot to be available for the fifth generation glass substrates
Robot to be available for the sixth and seventh generation glass substrates
Clean Exchanger
EFEM designed for 300mm (MEF series)
Load Port designed for 300mm FOUP (Comply with SEMI)
Handling Robot for wafer 300mm
Scissor Lifts
Conveyor System
Contact
Clean Buffer

Clean Flow System, Handling system for glass substrates
Clean Buffer

The Clean Buffer works as temporally stock to absorb the tact time lag between the devices, or as the Loader Unloader in the middle of a production line.

Features
  • Combined with the Clean Robot that handles the glass substrates and the cassettes stage, the Clean Buffer has three functions: temporally stock, a Loader, and an Unloader.
  • It arranges substrates when they are stored in the cassettes and sent down stream. Also, several types are available according to the installation apace and the alignment of the cassette stage.
  • Interface with the clean AGV is possible.
  • The Clean Booth is mounted on top.
  • Optical correction function is equipped.

Referential Diagram
7G size 2Port Buffer
7G size 2Port Buffer
5G size 2Port Buffer
5G size 2Port Buffer
* The size in a drawing is a reference value.

Clean Robot provides ideal glass substrate handling.
Robot to be available for the seventh generation glass substrates Robot to be available for the fifth generation glass substrates
Robot to be available for the seventh generation glass substrates Robot to be available for the fifth generation glass substrates

* For further information about Clean Flow System, do not hesitate to contact us:
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