MEIKIKOU CORPORATION
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CLEAN FLOW SYSTEM
Clean Loader Unloader
Clean Buffer
Clean Robot
Robot to be available for the fifth generation glass substrates
Robot to be available for the sixth and seventh generation glass substrates
Clean Exchanger
EFEM designed for 300mm (MEF series)
Load Port designed for 300mm FOUP (Comply with SEMI)
Handling Robot for wafer 300mm
Scissor Lifts
Conveyor System
Contact
Handling Robot for wafer 300mm

Clean Flow System, Handling Robot for wafers
Handling Robot for wafer 300mm
Here we present Handling Robot for 300mm wafers,which is a three axes cylindrical coordinate robot that has an multi-articulated mechanism on its X-axis. The Handling Robot is included in the configuration of EFEM and it performs wafer handling between devices or cassette devices in the production process in a clean room.

MCR2-3A515T (Twin Arm SZ type)
MCR2-3A515T-DZ (Twin Arm DZ type)
MCR2-3A525 (Single Arm SZ type)

Features
  • MCR2-3A515T (DZ)
  • Available for wafer 300mm
  • Cleanliness : Class1 (0.1μm)

* For further information about Handling system for wafer; Load port, do not hesitate to contact us:
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