MEIKIKOU CORPORATION
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CLEAN FLOW SYSTEM
Clean Loader Unloader
Clean Buffer
Clean Robot
Robot to be available for the fifth generation glass substrates
Robot to be available for the sixth and seventh generation glass substrates
Clean Exchanger
EFEM designed for 300mm (MEF series)
Load Port designed for 300mm FOUP (Comply with SEMI)
Handling Robot for wafer 300mm
Scissor Lifts
Conveyor System
Contact
Robot to be available for the fifth generation glass substrates

Clean Flow System, Clean Robot designed for glass substrates
MCR3-3C2000 (Twin Arm type)
Photo: MCR3-3C2000 (Twin Arm type)
We design and manufacture handling systems for LC panel or semiconductor production processes in clean rooms.

MCR3-3C2000T (Twin Arm type)
MCR3-3C2000 (Single Arm type)

Features
  • MCR2-3A2000(T)
  • Available for the fifth generation glass substrates (W1100xL1250)
  • Available for cassette-pass line of H1100mm and up-down stroke of 1000mm including a traveling axis
  • Available for contact-less alignment and mapping

* For further information about robot to be available for the fifth generation glass substrates; MCR-3C2000(T), do not hesitate to contact us:
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