MEIKIKOU CORPORATION
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CLEAN FLOW SYSTEM
Clean Loader Unloader
Clean Buffer
Clean Robot
Robot to be available for the fifth generation glass substrates
Robot to be available for the sixth and seventh generation glass substrates
Clean Exchanger
EFEM designed for 300mm (MEF series)
Load Port designed for 300mm FOUP (Comply with SEMI)
Handling Robot for wafer 300mm
Scissor Lifts
Conveyor System
Contact
Robot to be available for the sixth and seventh generation glass substrates

Clean Flow System, Clean Robot designed for glass substrates

Robot to be available for the sixth and seventh generation glass substrates
The stable and rigid body provides smooth handling up to the stroke of 3000mm!

MCR3-4A3000T (Twin Arm SZ type)
MCR3-4A3000 (Single Arm SZ type)

Features
  • Double telescopic motion structure is employed on X-axis.
  • Small turning radius.
  • Reduction of vibration on operation.
  • High-speed operation. (X-axis : 2.5s/3000mm)
  • Improvement of X-axis orbit adjustment by compensation function of hand. (Radius and height)
  • Available for the seventh generation glass substrates (W1800xL2100).

* For further information about robot to be available for the sixth and seventh generation glass substrates, do not hesitate to contact us:
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